CSIM
Incentive Program

CHIPS Investment Tax Credit (§48D)

Federal25% federal investment tax credit
What it is

25% federal investment tax credit for semiconductor manufacturing facilities or specialized equipment. Eligible for direct pay. Investment must be initiated by end of 2026 to qualify.

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Check an Address — Free Snapshot

See whether a specific Chicago address sits inside the area that unlocks CHIPS Investment Tax Credit (§48D), alongside every other incentive that touches that parcel.

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Who it's for

Businesses making qualified investments in semiconductor manufacturing facilities or specialized semiconductor manufacturing equipment.

Where it applies

CHIPS Investment Tax Credit (§48D) is administered at the federal level. Depending on the program, eligibility may depend on the specific location, property type, or business activity rather than a single drawn boundary.

Boundaries are precise and change over time, so exact eligibility always depends on the specific address. The fastest way to know is to run a free snapshot for the parcel you have in mind.

What it can support

Typical range · 25% federal investment tax credit

  • +25% federal investment tax credit
  • +Eligible for IRS direct pay (cash refund) without elective-pay restrictions
  • +Stacks with state MICRO program and Illinois Quantum Enterprise Zone incentives
How to apply
  1. 1Initiate qualified investment before end of 2026
  2. 2Pre-file with IRS Energy Credits Online for direct pay
  3. 3File Form 3468 with tax return; allocate credit on basis of investment basis
Fastest first move

Consult a tax advisor before initiating qualified investment

What you'll need
  • Documentation of qualified semiconductor manufacturing investment
  • Engineering and construction records
  • IRS direct-pay pre-filing registration
What to verify

This page is a starting point, not eligibility, legal, or tax advice. Verify current requirements, deadlines, and boundaries with the administering agency before applying or spending money — program rules and funding change over time.

Official source & contacts
Official program source ↗
Internal Revenue Service (IRS)

Last verified 2026-05-21

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